TEL Tokyo Electron 200mm CPHP General Chamber CPHG Clean Track Lithius Spare

TEL Tokyo Electron 200mm CPHP General Chamber CPHG Clean Track Lithius Spare

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Available: 1 In Stock
$9,008.23












TEL Tokyo Electron 200mm CPHP General Chamber CPHG Clean Track Lithius Spare










  • Model No: CPHP General Chamber CPHG
  • Removed from a TEL Tokyo Electron Clean Track Lithius 200mm System


    Installed Components


  • PCB Part No: HTE-TC1-B-12, TMB2000, BOARD,IF TC CTRL #01
  • PCB Part No: HTE-MC1-B-12, TMB2001, BOARD,CONN HPI #01
  • Omron Part No: E5ZT-N08TC01-2


    Parts List (This list is an approximation, some part numbers may not be installed or included)


    Assembly Part No: 5087-402251-17 FRAME(HP)ASSY


  • 5010-101313-12 FRAME(HP) 1
  • 5003-200012-11 DUCT(L) 1
  • 5003-200013-11 DUCT(R) 1
  • 5010-309519-11 SHUTTER(L) 1
  • 5010-309520-11 SHUTTER(R) 1
  • 5010-407356-11 BRACKET 2
  • 5010-309775-11 PLATE 2
  • 5010-407435-11 SEAL 2
  • 5010-404625-11 PLATE 2
  • 5003-300040-11 PORT 2
  • 5010-406012-11 BRACKET 1
  • 5010-202681-11 COVER,UNDER 1
  • 5010-405477-11 PLATE 1
  • 5010-404628-11 PIN 4
  • 5010-405474-11 PLATE 1
  • 5010-308929-11 BRACKET(L) 1
  • 5010-308931-11 BRACKET(R) 1
  • 028-003339-1 FITTING,TUBE M-5HL-6 2
  • 028-006361-1 FITTING,TUBE EUC6-TR 2
  • 5086-400749-11 SENSOR,PROXIMITY CPHP #01 1
  • 5086-401773-11 SENSOR,PROXIMITY CPHP #02 1
  • 026-102041-1 SET PLATE TM-147-1-5563 WASHER 4
  • 033-000007-1 NUT M4 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 18
  • 020-001091-1 CAP SCREW M4*16 SUS304 8
  • 028-005698-1 FITTING,TUBE BC6 2
  • 020-000518-1 CAP SCREW M3*4 SUS304 13
  • 020-000414-1 CAP SCREW M2*4 SUS304 4
  • 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 8


    Assembly Part No: 5087-402252-17 FRAME(COOL)ASSY


  • 5010-101534-11 FRAME(COOL) 1
  • 5010-404630-11 SUPPORT,PIN 1
  • 5010-310161-11 BRACKET 1
  • 5010-101500-11 PAN,DRAIN 1
  • 5010-404632-11 SUPPORT,PIN 1
  • 5086-400750-13 SENSOR,WATER LEAK CPHP #01 1
  • 5010-404633-11 SUPPORT,PIN 1
  • 5010-405661-11 BRACKET 2
  • 5010-407055-11 BRACKET 2
  • 5010-308813-12 COVER 1
  • 5010-407921-11 BRACKET 1
  • 026-000034-1 SET PLATE TM-147-2-5564 WASHER 2
  • 020-001126-1 SET SCREW M4*5 SUS304 2
  • 020-002807-1 CAP SCREW M4*12 SUS304 W/SPR & FLAT WASHER 6
  • 020-000028-1 CAP SCREW M4*6 SUS304 4
  • 033-000007-1 NUT M4 SUS304 1
  • 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 6
  • 020-000007-1 CAP SCREW M3*8 SUS304 4
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2


    Assembly Part No: 5087-401726-14 CHAMBER SLIDE BASE ASSY


  • 5003-300041-11 BLOCK 1
  • 5010-402512-11 COLLAR 1
  • 5003-300042-11 BLOCK 1
  • 5010-409255-11 BRACKET 1
  • 5010-308928-11 ARM 1
  • 5010-401825-11 PLATE 2
  • 026-005792-1 SPACER WSSS14-6-2 1
  • 5024-000077-11 AIR CYLINDER SSD-T1L2525-X08 1
  • 5018-000013-11 LM GUIDE LS200095ALK1 2
  • 020-000715-1 CAP SCREW M5*60 SUS304 4
  • 5086-403975-11 SENSOR,CYLINDER CPHP U/D #02 1
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
  • 020-000028-1 CAP SCREW M4*6 SUS304 10
  • 020-001167-1 CAP SCREW M5*10 SUS304 8
  • 020-100826-1 CAP SCREW M6*14 SUS304 1
  • 020-000737-1 CAP SCREW M5*14 SUS304 4
  • 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 4


    Assembly Part No: 5087-402253-13 BASE(COOL)ASSY,ARM SLIDE


  • 5010-101187-11 RAIL 1
  • 5010-400960-11 PLATE 1
  • 5003-300043-11 TABLE,SLIDE 1
  • 5010-401041-11 RETAINER 3
  • 5010-404692-11 COLLAR 1
  • 5010-404693-11 PLATE 1
  • 5018-000016-11 LM GUIDE SSR20XV2FME+486LF G=33 1
  • 5086-404170-11 SENSOR,CYLINDER CPHP I/O #03 1
  • 5010-306784-11 PLATE 1
  • 5010-307168-11 PLATE 1
  • 028-007910-1 FITTING,TUBE SS-6M0-1-2RT 1
  • 028-004163-1 FITTING,TUBE SS-6M0-2-2RT 1
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 5024-000115-11 AIR CYLINDER REBR25-380-DCH5583H 1
  • 020-007419-1 CAP SCREW CBSS5-8 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 6
  • 020-000032-1 CAP SCREW M4*10 SUS304 12
  • 020-000028-1 CAP SCREW M4*6 SUS304 1
  • 020-000737-1 CAP SCREW M5*14 SUS304 8
  • 020-001182-1 CAP SCREW M5*45 SUS304 4
  • 020-001167-1 CAP SCREW M5*10 SUS304 4
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
  • 020-000518-1 CAP SCREW M3*4 SUS304 2
  • 020-002601-1 BAIND SCREW M3*4 SUS304 2
  • 020-002060-1 SET SCREW M4*8 SUS304 3
  • 020-001093-1 CAP SCREW M4*14 SUS304 4
  • 028-017707-1 FITIING,TUBE M5H-6-DPH00207 4


    Assembly Part No: 5087-403204-12 PIN(CPHP200-HP) ASSY


  • 5010-308540-11 SUPPORT,PIN 1
  • 5010-309187-11 BLOCK(HP) 1
  • 5010-203600-11 ARM(HP),CPHP200 1
  • 5010-400930-11 COLLAR 1
  • 5010-404691-11 PLATE 1
  • 5024-000076-11 AIR CYLINDER SSD-T1L1625-X07 1
  • 5018-000011-11 LM GUIDE LS150080CLK1 1
  • 5086-403974-11 SENSOR,CYLINDER CPHP U/D #01 1
  • 5003-400004-11 PIN(85) 3
  • 5010-407374-11 PLATE 1
  • 026-005603-1 SPACER WSSS10-4-1 1
  • 020-000642-1 CAP SCREW M3*55 SUS304 4
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 1
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 1
  • 020-001089-1 CAP SCREW M3*14 SUS304 4
  • 020-002059-1 SET SCREW M3*5 SUS304 3
  • 020-000028-1 CAP SCREW M4*6 SUS304 2
  • 020-000009-1 CAP SCREW M3*10 SUS304 2
  • 020-001126-1 SET SCREW M4*5 SUS304 5
  • 020-000032-1 CAP SCREW M4*10 SUS304 1
  • 020-001091-1 CAP SCREW M4*16 SUS304 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 3
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 3


    Assembly Part No: 5087-403203-12 PIN(CPHG200-COOL) ASSY


  • 5010-308540-11 SUPPORT,PIN 1
  • 5003-400005-11 PIN(63) 3
  • 5010-405467-11 PLATE 1
  • 5010-309414-11 ARM(COOL),CPHP200 1
  • 5010-400930-11 COLLAR 1
  • 5024-000078-11 AIR CYLINDER SSD-T2L1632-X04 1
  • 5018-000012-11 LM GUIDE SSR15XV1FME+80LYF 1
  • 5086-400737-11 SENSOR,CYLINDER CPHP U/D #03 1
  • 5010-309185-11 BLOCK(COOL) 1
  • 5010-407374-11 PLATE 1
  • 026-005603-1 SPACER WSSS10-4-1 1
  • 020-000642-1 CAP SCREW M3*55 SUS304 4
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 5
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 1
  • 020-100933-1 SET SCREW M3*3 SUS304 3
  • 020-000032-1 CAP SCREW M4*10 SUS304 6
  • 020-001126-1 SET SCREW M4*5 SUS304 3
  • 020-001089-1 CAP SCREW M3*14 SUS304 4
  • 020-000042-1 CAP SCREW M4*20 SUS304 2
  • 020-000028-1 CAP SCREW M4*6 SUS304 2
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 3


    Assembly Part No: 5085-413737-11 SUPPORT(CPHP200) ASSY


  • 5010-203352-11 RING(200),SUPPORT 1
  • 5010-309655-11 PLATE 1
  • 5010-310195-11 BRACKET 2
  • 5010-310197-11 PLATE(1T) 2
  • 027-005806-1 O-RING SRERIA FP64 AS568-377 BLACK 1
  • 020-000028-1 CAP SCREW M4*6 SUS304 8
  • 020-000030-1 CAP SCREW M4*8 SUS304 18


    Assembly Part No: 5085-413229-11 PLATE ASSY(200-CPHP-KCR)


  • 5043-000009-11 HOT PLATE NGT8-CPHP-KCR 1


    Assembly Part No: 5085-413203-11 CHAMBER(200) ASSY


  • 5010-101664-11 PLATE 1
  • 5010-101665-11 RING(1) 1
  • 5010-101666-11 RING(2) 1
  • 5010-203636-11 RING(3) 1
  • 5010-101668-11 PLATE(1) 1
  • 5010-101669-11 PLATE(2) 1
  • 5004-300061-11 ROD (509510054211 4
  • 5010-402181-11 SPACER 4
  • 5010-406973-11 BLOCK 1
  • 5010-401246-11 MESH 1
  • 5010-203641-11 BRACKET(MOUNT) 1
  • 5010-306605-13 ARM(L) 1
  • 5010-306604-12 ARM(R) 1
  • 5010-406011-11 BRACKET 1
  • 5010-407535-11 BRACKET(TUBE) 1
  • 5010-203638-11 TUBE(IN) 1
  • 5010-203640-11 TUBE(OUT) 1
  • 5010-405648-11 PLATE 2
  • 027-003302-1 O-RING PARFLO S-7 BLACK 1
  • 028-017536-1 FITTING,TUBE IN-233-1369 1
  • 028-018107-1 FITTING,TUBE M5H-DPH00436 1
  • 020-000005-1 CAP SCREW M3*6 SUS304 8
  • 020-000009-1 CAP SCREW M3*10 SUS304 5
  • 020-000020-1 CAP SCREW M3*20 SUS304 14
  • 020-000561-1 SET SCREW M5*8 SUS304 4
  • 033-000012-1 NUT M5 SUS304 4
  • 028-007168-1 FITTING,RESIN EUL1/4-C1 1
  • 020-000414-1 CAP SCREW M2*4 SUS304 2
  • 020-000083-1 CAP SCREW M6*12 SUS304 4
  • 020-000030-1 CAP SCREW M4*8 SUS304 8
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 6
  • 020-000007-1 CAP SCREW M3*8 SUS304 4


    Assembly Part No: 5087-404325-12 COOL ARM(CPHP200) ASSY


  • 5010-311732-11 BRACKET,ARM 1
  • 5010-311938-11 COVER 1
  • 5004-400008-11 PIN,CENTERING,(509510016711 3
  • 5010-408740-11 COVER 1
  • 5010-408739-11 COVER 1
  • 5010-311287-11 ROD 2
  • 5010-408409-11 PLATE 2
  • 5010-408412-11 JOINT 2
  • 5010-407905-11 HOLDER(1) 2
  • 5010-310473-11 HOLDER(2) 2
  • 5004-400005-11 GUIDE,COL(509510016811 3
  • 5010-407906-11 HOLDER(5) 2
  • 5010-407907-11 HOLDER(6) 2
  • 5013-000017-12 COOLING PLATE CPHP26110-Y04-0199 1
  • 5086-405536-11 SENSOR,CYLINDER CPHP U/D #07 1
  • 5041-000246-11 CABLE ASSY 1-1717319-1(CPHP EXT #09) 1
  • 5010-406785-11 BLOCK(1) 1
  • 5010-406786-11 BLOCK(2) 1
  • 5010-408981-11 PIN 2
  • 5010-409096-11 BRACKET 1
  • 024-007601-1 SPEED CONTROLLER AS1200-M3 2
  • 028-002280-1 FITTING,TUBE F900-P-6.35 2
  • 017-001484-1 TUBE,TEFLON NO.9003-BT 1/4B 2
  • 022-000764-1 BEARING R-BRF0304 2
  • 022-001775-1 BEARING R-BRF0404 2
  • 032-000014-1 FLAT WASHER M4 NYLON POLISHED ROUND 2
  • 024-021457-1 AIR CYLINDER CXSJL6P-10 1
  • 020-002602-1 BIND SCREW 3M*6 SUS304 2
  • 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 2
  • 033-000003-1 NUT M3 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 3
  • 020-000007-1 CAP SCREW M3*8 SUS304 3
  • 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 3
  • 020-000030-1 CAP SCREW M4*8 SUS304 4
  • 028-018553-1 FITTING,TUBE IN-233-840 2
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 4
  • 020-001234-1 CAP SCREW M2.6*8 SUS304 8
  • 1380-002378-11 TUBE,SHRINK 6*0.25 1
  • 020-000519-1 CAP SCREW M3*16 SUS304 2
  • 032-000008-1 FLAT WASHER M3 NYLON POLISHED ROUND 2
  • 021-100399-1 RING,RETAINING E-TTPE ETW-2 SUS304 2
  • 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 2
  • 020-100801-1 CAP SCREW M3*5 SUS304 2
  • 032-000054-1 SPRING WASHER M3 SUS304 2
  • 020-000012-1 CAP SCREW M3*12 SUS304 1
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2
  • 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 4


    Assembly Part No: 5087-404561-11 BASE(E-CPHP-200) ASSY


  • 5012-000019-11 SOLENOID VALVE SS5Y3-07-X1234 1
  • 5010-308942-11 BRACKET 1
  • 5010-306347-11 PLATE 1
  • 5010-407062-11 BRACKET 1
  • 5010-306591-11 PAN,DRAIN 1
  • 5010-101635-11 COVER(CPHP) 1
  • 5010-308937-11 BRACKET 1
  • 5010-308936-11 BRACKET 1
  • 5010-400980-11 PLATE 1
  • 5010-308930-11 BASE(R) 1
  • 5010-308932-11 BASE(L) 1
  • 5010-407056-11 BRACEKT 1
  • 5010-407057-11 BRACEKT 1
  • 5010-305982-11 BLOCK 1
  • 5010-101526-11 BASE 1
  • 5003-200010-11 PLATE,COOL 1
  • 5010-306595-11 PLATE 1
  • 5010-308768-11 COVER,CONNECTOR 1
  • 5010-306348-11 PLATE 1
  • 5041-000234-11 CABLE ASSY 1746253-1(THERMO EXT #01) 1
  • 5041-000244-12 CABLE ASSY 1717319-3(CPHP EXT #03) 1
  • 5041-000245-12 CABLE ASSY 1717319-1(CPHP EXT #04) 1
  • 5041-000247-11 CABLE ASSY 1-1717319-5(CPHP EXT #14) 1
  • 5041-000248-11 CABLE ASSY 1-1717319-6(CPHP EXT #15) 1
  • 5041-000249-11 CABLE ASSY 1-1717319-7(CPHP EXT #16) 1
  • 5086-400751-12 CABLE,CPHP EXT #08 1
  • 5086-404169-11 CABLE,CPHP EXT #17 1
  • 5086-401771-12 CABLE,CPHP EXT #12 1
  • 5086-400752-11 CABLE,CPHP SIG #01 1
  • 5086-400753-11 CABLE,CPHP SIG #02 1
  • 5086-400754-11 CABLE,CPHP SIG #03 1
  • 5086-400755-11 CABLE,CPHP SIG #04 1
  • 5086-400756-11 CABLE,CPHP SIG #05 1
  • 5086-400758-12 SENSOR,THERMOSTAT CPHP #01 1
  • 5086-400759-11 CABLE,DC CPHP PWR #01 1
  • 5041-000230-11 CABLE ASSY 1717320-3(CPHP EMO #01) 1
  • 5086-404752-11 CABLE,CPHP EMO #03 1
  • 5086-401626-11 CABLE,GND CPHP #01 1
  • 5086-401777-11 CABLE,CPHP HEAT #01 1
  • 5086-401778-11 CABLE,CPHP TC #01 1
  • 5086-401779-11 CABLE,CPHP THERMO #01 1
  • 2914-000011-12 ACOUSTIC UNIT E5ZT-NW08TC01-2 1
  • 5010-405925-11 TUBE 1
  • 5010-306138-11 TUBE 1
  • 5010-403750-11 TUBE 1
  • 5010-308935-11 SEAT 1
  • 5010-202632-11 PIPE 1
  • 5010-407045-11 BRACKET 2
  • 5044-000008-11 I/F BOARD TMB2001(BOARD,CONN HPI #01) 1
  • 5010-402221-11 HOLDER 1
  • 5086-404247-11 SENSOR,PRESS CPHP EXH #04 1
  • 5010-407043-11 BRACKET 1
  • 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) 1
  • 028-002956-1 FITTING,TUBE M-5J 2
  • 028-004347-1 FITTING,TUBE KJL06-01S 3
  • 028-003339-1 FITTING,TUBE M-5HL-6 2
  • 028-004353-1 FITTING,TUBE KJU06-00 1
  • 028-002258-1 FITTING,TUBE F900-L-6.35A 1
  • 028-003330-1 FITTING,TUBE ELB4-M5-TR 2
  • 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
  • 020-002448-1 CAP SCREW M3*70 SUS304 4
  • 028-002152-1 FITTING,TUBE F900-F-6.35 3
  • 028-007168-1 FITTING,RESIN EUL1/4-C1 1
  • 5024-000109-11 DAMPER AS-DPH00222 1
  • 024-019596-1 SPEED CONTROLLER AS1001FM-04 1
  • 044-000045-1 SUPPORT,PCB EM-5 8
  • 044-000044-1 SUPPORT,PCB EM-3 2
  • 020-001178-1 CAP SCREW M3*30 SUS304 4
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 15
  • 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE 4
  • 020-000518-1 CAP SCREW M3*4 SUS304 22
  • 020-000042-1 CAP SCREW M4*20 SUS304 2
  • 028-002197-1 FITTING,TUBE F900-H-6.35A 1
  • 020-002602-1 BIND SCREW 3M*6 SUS304 2
  • 028-003337-1 FITTING,TUBE M-5H-4 12
  • 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 12
  • 024-004534-1 SPEED CONTROLLER AS2001F-06 2
  • 020-000090-1 CAP SCREW M6*20 SUS304 1
  • 020-000009-1 CAP SCREW M3*10 SUS304 8
  • 020-000032-1 CAP SCREW M4*10 SUS304 17
  • 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 2
  • 028-003338-1 FITTING,TUBE M-5HL-4 2


    Assembly Part No: 5085-411853-13 COVER(CPHP200) ASSY


  • 5010-101442-11 COVER 1
  • 5010-203275-11 COVER 1
  • 5010-310493-11 COVER(8) 1
  • 5010-100902-11 COVER 1
  • 5010-203904-11 COVER(8) 1
  • 5010-101823-11 COVER(8-C) 1
  • 5010-101220-11 COVER 1
  • 5010-203905-11 COVER(8) 1
  • 5010-305529-11 COVER 1
  • 5010-407904-11 BRACKET 1
  • 5010-203922-11 COVER(8) 1
  • 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
  • 020-002601-1 BAIND SCREW M3*4 SUS304 18
  • 020-000518-1 CAP SCREW M3*4 SUS304 2
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 7
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 5
    205 020-002602-1 BIND SCREW 3M*6 SUS304 2


    Assembly Part No: 5085-409715-12 COVER(CLHP)ASSY,BACK


  • 5010-407129-11 PLATE 1
  • 5010-406167-11 PLATE 1
  • 5010-407128-11 PLATE 1
  • 5010-406168-11 PLATE 1
  • 5010-309048-11 BASE,PANEL 1
  • 5010-307114-11 PANEL 1
  • 5010-306690-11 PLATE,NUT 1
  • 5010-306691-11 PLATE,NUT 1
  • 5010-407134-11 PACKING 1
  • 5010-406169-11 PACKING 1
  • 5010-307111-11 PACKING 1
  • 5010-405584-11 LEVER 2
  • 5010-405653-11 BASE,HOLDER(R) 1
  • 5010-405654-11 HOLDER 1
  • 5010-405655-11 PLATE 2
  • 5010-405656-11 PACKING 2
  • 5010-308897-11 PANEL 1
  • 026-007246-1 SPACER WSSS5-3-1 10
  • 026-007272-1 SPACER FWSSS-D5-V3-T1.5 5
  • 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P02872)
  • 026-002709-1 HANDLE A-67 1
  • 020-000009-1 CAP SCREW M3*10 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 7
  • 020-000518-1 CAP SCREW M3*4 SUS304 4
  • 020-001532-1 BAIND SCREW M3*8 SUS304 13
  • 020-000414-1 CAP SCREW M2*4 SUS304 4
  • 020-001089-1 CAP SCREW M3*14 SUS304 2
  • 033-000003-1 NUT M3 SUS304 2
  • 020-000032-1 CAP SCREW M4*10 SUS304 2





    This TEL Tokyo Electron 200mm CPHP General Chamber is used working surplus. The physical condition is good, but there are signs of previous use and handling.





  • Sale Details





    • Item Condition: Used Working, 90 Day Warranty


    • Estimated Packed Shipping Dimensions: L x W x H = L x W x H = 55"x26"x20" @ 265 lbs.; Requires Freight Shipping 
    • Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
    • Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
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    TEL Tokyo Electron 200mm CPHP General Chamber CPHG Clean Track Lithius Spare










  • Model No: CPHP General Chamber CPHG
  • Removed from a TEL Tokyo Electron Clean Track Lithius 200mm System


    Installed Components


  • PCB Part No: HTE-TC1-B-12, TMB2000, BOARD,IF TC CTRL #01
  • PCB Part No: HTE-MC1-B-12, TMB2001, BOARD,CONN HPI #01
  • Omron Part No: E5ZT-N08TC01-2


    Parts List (This list is an approximation, some part numbers may not be installed or included)


    Assembly Part No: 5087-402251-17 FRAME(HP)ASSY


  • 5010-101313-12 FRAME(HP) 1
  • 5003-200012-11 DUCT(L) 1
  • 5003-200013-11 DUCT(R) 1
  • 5010-309519-11 SHUTTER(L) 1
  • 5010-309520-11 SHUTTER(R) 1
  • 5010-407356-11 BRACKET 2
  • 5010-309775-11 PLATE 2
  • 5010-407435-11 SEAL 2
  • 5010-404625-11 PLATE 2
  • 5003-300040-11 PORT 2
  • 5010-406012-11 BRACKET 1
  • 5010-202681-11 COVER,UNDER 1
  • 5010-405477-11 PLATE 1
  • 5010-404628-11 PIN 4
  • 5010-405474-11 PLATE 1
  • 5010-308929-11 BRACKET(L) 1
  • 5010-308931-11 BRACKET(R) 1
  • 028-003339-1 FITTING,TUBE M-5HL-6 2
  • 028-006361-1 FITTING,TUBE EUC6-TR 2
  • 5086-400749-11 SENSOR,PROXIMITY CPHP #01 1
  • 5086-401773-11 SENSOR,PROXIMITY CPHP #02 1
  • 026-102041-1 SET PLATE TM-147-1-5563 WASHER 4
  • 033-000007-1 NUT M4 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 18
  • 020-001091-1 CAP SCREW M4*16 SUS304 8
  • 028-005698-1 FITTING,TUBE BC6 2
  • 020-000518-1 CAP SCREW M3*4 SUS304 13
  • 020-000414-1 CAP SCREW M2*4 SUS304 4
  • 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 8


    Assembly Part No: 5087-402252-17 FRAME(COOL)ASSY


  • 5010-101534-11 FRAME(COOL) 1
  • 5010-404630-11 SUPPORT,PIN 1
  • 5010-310161-11 BRACKET 1
  • 5010-101500-11 PAN,DRAIN 1
  • 5010-404632-11 SUPPORT,PIN 1
  • 5086-400750-13 SENSOR,WATER LEAK CPHP #01 1
  • 5010-404633-11 SUPPORT,PIN 1
  • 5010-405661-11 BRACKET 2
  • 5010-407055-11 BRACKET 2
  • 5010-308813-12 COVER 1
  • 5010-407921-11 BRACKET 1
  • 026-000034-1 SET PLATE TM-147-2-5564 WASHER 2
  • 020-001126-1 SET SCREW M4*5 SUS304 2
  • 020-002807-1 CAP SCREW M4*12 SUS304 W/SPR & FLAT WASHER 6
  • 020-000028-1 CAP SCREW M4*6 SUS304 4
  • 033-000007-1 NUT M4 SUS304 1
  • 020-002913-1 CAP SCREW M4*8 SUS304 W/SPR & FLAT WASHER 6
  • 020-000007-1 CAP SCREW M3*8 SUS304 4
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2


    Assembly Part No: 5087-401726-14 CHAMBER SLIDE BASE ASSY


  • 5003-300041-11 BLOCK 1
  • 5010-402512-11 COLLAR 1
  • 5003-300042-11 BLOCK 1
  • 5010-409255-11 BRACKET 1
  • 5010-308928-11 ARM 1
  • 5010-401825-11 PLATE 2
  • 026-005792-1 SPACER WSSS14-6-2 1
  • 5024-000077-11 AIR CYLINDER SSD-T1L2525-X08 1
  • 5018-000013-11 LM GUIDE LS200095ALK1 2
  • 020-000715-1 CAP SCREW M5*60 SUS304 4
  • 5086-403975-11 SENSOR,CYLINDER CPHP U/D #02 1
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 2
  • 020-000028-1 CAP SCREW M4*6 SUS304 10
  • 020-001167-1 CAP SCREW M5*10 SUS304 8
  • 020-100826-1 CAP SCREW M6*14 SUS304 1
  • 020-000737-1 CAP SCREW M5*14 SUS304 4
  • 020-000194-1 FLAT COUNTERSUNK HEAD SCREW M4*8 SUS304 4


    Assembly Part No: 5087-402253-13 BASE(COOL)ASSY,ARM SLIDE


  • 5010-101187-11 RAIL 1
  • 5010-400960-11 PLATE 1
  • 5003-300043-11 TABLE,SLIDE 1
  • 5010-401041-11 RETAINER 3
  • 5010-404692-11 COLLAR 1
  • 5010-404693-11 PLATE 1
  • 5018-000016-11 LM GUIDE SSR20XV2FME+486LF G=33 1
  • 5086-404170-11 SENSOR,CYLINDER CPHP I/O #03 1
  • 5010-306784-11 PLATE 1
  • 5010-307168-11 PLATE 1
  • 028-007910-1 FITTING,TUBE SS-6M0-1-2RT 1
  • 028-004163-1 FITTING,TUBE SS-6M0-2-2RT 1
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 5024-000115-11 AIR CYLINDER REBR25-380-DCH5583H 1
  • 020-007419-1 CAP SCREW CBSS5-8 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 6
  • 020-000032-1 CAP SCREW M4*10 SUS304 12
  • 020-000028-1 CAP SCREW M4*6 SUS304 1
  • 020-000737-1 CAP SCREW M5*14 SUS304 8
  • 020-001182-1 CAP SCREW M5*45 SUS304 4
  • 020-001167-1 CAP SCREW M5*10 SUS304 4
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
  • 020-000518-1 CAP SCREW M3*4 SUS304 2
  • 020-002601-1 BAIND SCREW M3*4 SUS304 2
  • 020-002060-1 SET SCREW M4*8 SUS304 3
  • 020-001093-1 CAP SCREW M4*14 SUS304 4
  • 028-017707-1 FITIING,TUBE M5H-6-DPH00207 4


    Assembly Part No: 5087-403204-12 PIN(CPHP200-HP) ASSY


  • 5010-308540-11 SUPPORT,PIN 1
  • 5010-309187-11 BLOCK(HP) 1
  • 5010-203600-11 ARM(HP),CPHP200 1
  • 5010-400930-11 COLLAR 1
  • 5010-404691-11 PLATE 1
  • 5024-000076-11 AIR CYLINDER SSD-T1L1625-X07 1
  • 5018-000011-11 LM GUIDE LS150080CLK1 1
  • 5086-403974-11 SENSOR,CYLINDER CPHP U/D #01 1
  • 5003-400004-11 PIN(85) 3
  • 5010-407374-11 PLATE 1
  • 026-005603-1 SPACER WSSS10-4-1 1
  • 020-000642-1 CAP SCREW M3*55 SUS304 4
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 1
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 1
  • 020-001089-1 CAP SCREW M3*14 SUS304 4
  • 020-002059-1 SET SCREW M3*5 SUS304 3
  • 020-000028-1 CAP SCREW M4*6 SUS304 2
  • 020-000009-1 CAP SCREW M3*10 SUS304 2
  • 020-001126-1 SET SCREW M4*5 SUS304 5
  • 020-000032-1 CAP SCREW M4*10 SUS304 1
  • 020-001091-1 CAP SCREW M4*16 SUS304 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 3
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 3


    Assembly Part No: 5087-403203-12 PIN(CPHG200-COOL) ASSY


  • 5010-308540-11 SUPPORT,PIN 1
  • 5003-400005-11 PIN(63) 3
  • 5010-405467-11 PLATE 1
  • 5010-309414-11 ARM(COOL),CPHP200 1
  • 5010-400930-11 COLLAR 1
  • 5024-000078-11 AIR CYLINDER SSD-T2L1632-X04 1
  • 5018-000012-11 LM GUIDE SSR15XV1FME+80LYF 1
  • 5086-400737-11 SENSOR,CYLINDER CPHP U/D #03 1
  • 5010-309185-11 BLOCK(COOL) 1
  • 5010-407374-11 PLATE 1
  • 026-005603-1 SPACER WSSS10-4-1 1
  • 020-000642-1 CAP SCREW M3*55 SUS304 4
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 5
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 028-017537-1 FITTING,TUBE M5HLH-4-DPH00108 1
  • 020-100933-1 SET SCREW M3*3 SUS304 3
  • 020-000032-1 CAP SCREW M4*10 SUS304 6
  • 020-001126-1 SET SCREW M4*5 SUS304 3
  • 020-001089-1 CAP SCREW M3*14 SUS304 4
  • 020-000042-1 CAP SCREW M4*20 SUS304 2
  • 020-000028-1 CAP SCREW M4*6 SUS304 2
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 3


    Assembly Part No: 5085-413737-11 SUPPORT(CPHP200) ASSY


  • 5010-203352-11 RING(200),SUPPORT 1
  • 5010-309655-11 PLATE 1
  • 5010-310195-11 BRACKET 2
  • 5010-310197-11 PLATE(1T) 2
  • 027-005806-1 O-RING SRERIA FP64 AS568-377 BLACK 1
  • 020-000028-1 CAP SCREW M4*6 SUS304 8
  • 020-000030-1 CAP SCREW M4*8 SUS304 18


    Assembly Part No: 5085-413229-11 PLATE ASSY(200-CPHP-KCR)


  • 5043-000009-11 HOT PLATE NGT8-CPHP-KCR 1


    Assembly Part No: 5085-413203-11 CHAMBER(200) ASSY


  • 5010-101664-11 PLATE 1
  • 5010-101665-11 RING(1) 1
  • 5010-101666-11 RING(2) 1
  • 5010-203636-11 RING(3) 1
  • 5010-101668-11 PLATE(1) 1
  • 5010-101669-11 PLATE(2) 1
  • 5004-300061-11 ROD (509510054211 4
  • 5010-402181-11 SPACER 4
  • 5010-406973-11 BLOCK 1
  • 5010-401246-11 MESH 1
  • 5010-203641-11 BRACKET(MOUNT) 1
  • 5010-306605-13 ARM(L) 1
  • 5010-306604-12 ARM(R) 1
  • 5010-406011-11 BRACKET 1
  • 5010-407535-11 BRACKET(TUBE) 1
  • 5010-203638-11 TUBE(IN) 1
  • 5010-203640-11 TUBE(OUT) 1
  • 5010-405648-11 PLATE 2
  • 027-003302-1 O-RING PARFLO S-7 BLACK 1
  • 028-017536-1 FITTING,TUBE IN-233-1369 1
  • 028-018107-1 FITTING,TUBE M5H-DPH00436 1
  • 020-000005-1 CAP SCREW M3*6 SUS304 8
  • 020-000009-1 CAP SCREW M3*10 SUS304 5
  • 020-000020-1 CAP SCREW M3*20 SUS304 14
  • 020-000561-1 SET SCREW M5*8 SUS304 4
  • 033-000012-1 NUT M5 SUS304 4
  • 028-007168-1 FITTING,RESIN EUL1/4-C1 1
  • 020-000414-1 CAP SCREW M2*4 SUS304 2
  • 020-000083-1 CAP SCREW M6*12 SUS304 4
  • 020-000030-1 CAP SCREW M4*8 SUS304 8
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 6
  • 020-000007-1 CAP SCREW M3*8 SUS304 4


    Assembly Part No: 5087-404325-12 COOL ARM(CPHP200) ASSY


  • 5010-311732-11 BRACKET,ARM 1
  • 5010-311938-11 COVER 1
  • 5004-400008-11 PIN,CENTERING,(509510016711 3
  • 5010-408740-11 COVER 1
  • 5010-408739-11 COVER 1
  • 5010-311287-11 ROD 2
  • 5010-408409-11 PLATE 2
  • 5010-408412-11 JOINT 2
  • 5010-407905-11 HOLDER(1) 2
  • 5010-310473-11 HOLDER(2) 2
  • 5004-400005-11 GUIDE,COL(509510016811 3
  • 5010-407906-11 HOLDER(5) 2
  • 5010-407907-11 HOLDER(6) 2
  • 5013-000017-12 COOLING PLATE CPHP26110-Y04-0199 1
  • 5086-405536-11 SENSOR,CYLINDER CPHP U/D #07 1
  • 5041-000246-11 CABLE ASSY 1-1717319-1(CPHP EXT #09) 1
  • 5010-406785-11 BLOCK(1) 1
  • 5010-406786-11 BLOCK(2) 1
  • 5010-408981-11 PIN 2
  • 5010-409096-11 BRACKET 1
  • 024-007601-1 SPEED CONTROLLER AS1200-M3 2
  • 028-002280-1 FITTING,TUBE F900-P-6.35 2
  • 017-001484-1 TUBE,TEFLON NO.9003-BT 1/4B 2
  • 022-000764-1 BEARING R-BRF0304 2
  • 022-001775-1 BEARING R-BRF0404 2
  • 032-000014-1 FLAT WASHER M4 NYLON POLISHED ROUND 2
  • 024-021457-1 AIR CYLINDER CXSJL6P-10 1
  • 020-002602-1 BIND SCREW 3M*6 SUS304 2
  • 032-000159-1 FALT WASHER M3 SUS SMALL CIRCLE 2
  • 033-000003-1 NUT M3 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 3
  • 020-000007-1 CAP SCREW M3*8 SUS304 3
  • 020-000177-1 FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 3
  • 020-000030-1 CAP SCREW M4*8 SUS304 4
  • 028-018553-1 FITTING,TUBE IN-233-840 2
  • 028-005990-1 FITTING,TUBE CF-SUS 2
  • 028-017535-1 FITTING,TUBE M5H-4-DPH00107 4
  • 020-001234-1 CAP SCREW M2.6*8 SUS304 8
  • 1380-002378-11 TUBE,SHRINK 6*0.25 1
  • 020-000519-1 CAP SCREW M3*16 SUS304 2
  • 032-000008-1 FLAT WASHER M3 NYLON POLISHED ROUND 2
  • 021-100399-1 RING,RETAINING E-TTPE ETW-2 SUS304 2
  • 020-000173-1 FLAT COUNTERSUNK HEAD SCREW M3*6 SUS304 2
  • 020-100801-1 CAP SCREW M3*5 SUS304 2
  • 032-000054-1 SPRING WASHER M3 SUS304 2
  • 020-000012-1 CAP SCREW M3*12 SUS304 1
  • 020-000821-1 CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER 2
  • 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 4


    Assembly Part No: 5087-404561-11 BASE(E-CPHP-200) ASSY


  • 5012-000019-11 SOLENOID VALVE SS5Y3-07-X1234 1
  • 5010-308942-11 BRACKET 1
  • 5010-306347-11 PLATE 1
  • 5010-407062-11 BRACKET 1
  • 5010-306591-11 PAN,DRAIN 1
  • 5010-101635-11 COVER(CPHP) 1
  • 5010-308937-11 BRACKET 1
  • 5010-308936-11 BRACKET 1
  • 5010-400980-11 PLATE 1
  • 5010-308930-11 BASE(R) 1
  • 5010-308932-11 BASE(L) 1
  • 5010-407056-11 BRACEKT 1
  • 5010-407057-11 BRACEKT 1
  • 5010-305982-11 BLOCK 1
  • 5010-101526-11 BASE 1
  • 5003-200010-11 PLATE,COOL 1
  • 5010-306595-11 PLATE 1
  • 5010-308768-11 COVER,CONNECTOR 1
  • 5010-306348-11 PLATE 1
  • 5041-000234-11 CABLE ASSY 1746253-1(THERMO EXT #01) 1
  • 5041-000244-12 CABLE ASSY 1717319-3(CPHP EXT #03) 1
  • 5041-000245-12 CABLE ASSY 1717319-1(CPHP EXT #04) 1
  • 5041-000247-11 CABLE ASSY 1-1717319-5(CPHP EXT #14) 1
  • 5041-000248-11 CABLE ASSY 1-1717319-6(CPHP EXT #15) 1
  • 5041-000249-11 CABLE ASSY 1-1717319-7(CPHP EXT #16) 1
  • 5086-400751-12 CABLE,CPHP EXT #08 1
  • 5086-404169-11 CABLE,CPHP EXT #17 1
  • 5086-401771-12 CABLE,CPHP EXT #12 1
  • 5086-400752-11 CABLE,CPHP SIG #01 1
  • 5086-400753-11 CABLE,CPHP SIG #02 1
  • 5086-400754-11 CABLE,CPHP SIG #03 1
  • 5086-400755-11 CABLE,CPHP SIG #04 1
  • 5086-400756-11 CABLE,CPHP SIG #05 1
  • 5086-400758-12 SENSOR,THERMOSTAT CPHP #01 1
  • 5086-400759-11 CABLE,DC CPHP PWR #01 1
  • 5041-000230-11 CABLE ASSY 1717320-3(CPHP EMO #01) 1
  • 5086-404752-11 CABLE,CPHP EMO #03 1
  • 5086-401626-11 CABLE,GND CPHP #01 1
  • 5086-401777-11 CABLE,CPHP HEAT #01 1
  • 5086-401778-11 CABLE,CPHP TC #01 1
  • 5086-401779-11 CABLE,CPHP THERMO #01 1
  • 2914-000011-12 ACOUSTIC UNIT E5ZT-NW08TC01-2 1
  • 5010-405925-11 TUBE 1
  • 5010-306138-11 TUBE 1
  • 5010-403750-11 TUBE 1
  • 5010-308935-11 SEAT 1
  • 5010-202632-11 PIPE 1
  • 5010-407045-11 BRACKET 2
  • 5044-000008-11 I/F BOARD TMB2001(BOARD,CONN HPI #01) 1
  • 5010-402221-11 HOLDER 1
  • 5086-404247-11 SENSOR,PRESS CPHP EXH #04 1
  • 5010-407043-11 BRACKET 1
  • 5044-000003-11 PCB,I/F TMB2000(BOARD,IF TC CTRL #01) 1
  • 028-002956-1 FITTING,TUBE M-5J 2
  • 028-004347-1 FITTING,TUBE KJL06-01S 3
  • 028-003339-1 FITTING,TUBE M-5HL-6 2
  • 028-004353-1 FITTING,TUBE KJU06-00 1
  • 028-002258-1 FITTING,TUBE F900-L-6.35A 1
  • 028-003330-1 FITTING,TUBE ELB4-M5-TR 2
  • 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
  • 020-002448-1 CAP SCREW M3*70 SUS304 4
  • 028-002152-1 FITTING,TUBE F900-F-6.35 3
  • 028-007168-1 FITTING,RESIN EUL1/4-C1 1
  • 5024-000109-11 DAMPER AS-DPH00222 1
  • 024-019596-1 SPEED CONTROLLER AS1001FM-04 1
  • 044-000045-1 SUPPORT,PCB EM-5 8
  • 044-000044-1 SUPPORT,PCB EM-3 2
  • 020-001178-1 CAP SCREW M3*30 SUS304 4
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 2
  • 020-000005-1 CAP SCREW M3*6 SUS304 15
  • 020-001720-1 SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE 4
  • 020-000518-1 CAP SCREW M3*4 SUS304 22
  • 020-000042-1 CAP SCREW M4*20 SUS304 2
  • 028-002197-1 FITTING,TUBE F900-H-6.35A 1
  • 020-002602-1 BIND SCREW 3M*6 SUS304 2
  • 028-003337-1 FITTING,TUBE M-5H-4 12
  • 024-012193-1 SPEED CONTROLLER INA-14-176(199880070511 12
  • 024-004534-1 SPEED CONTROLLER AS2001F-06 2
  • 020-000090-1 CAP SCREW M6*20 SUS304 1
  • 020-000009-1 CAP SCREW M3*10 SUS304 8
  • 020-000032-1 CAP SCREW M4*10 SUS304 17
  • 032-000267-1 FLAT WASHER M4 SUS304 SMALL CIRCLE 2
  • 028-003338-1 FITTING,TUBE M-5HL-4 2


    Assembly Part No: 5085-411853-13 COVER(CPHP200) ASSY


  • 5010-101442-11 COVER 1
  • 5010-203275-11 COVER 1
  • 5010-310493-11 COVER(8) 1
  • 5010-100902-11 COVER 1
  • 5010-203904-11 COVER(8) 1
  • 5010-101823-11 COVER(8-C) 1
  • 5010-101220-11 COVER 1
  • 5010-203905-11 COVER(8) 1
  • 5010-305529-11 COVER 1
  • 5010-407904-11 BRACKET 1
  • 5010-203922-11 COVER(8) 1
  • 026-006336-1 SPACER FWSSS-D5-V3-T1.3 2
  • 020-002601-1 BAIND SCREW M3*4 SUS304 18
  • 020-000518-1 CAP SCREW M3*4 SUS304 2
  • 020-000169-1 FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 7
  • 032-000005-1 FLAT WASHER M3 SUS304 POLISHED ROUND 5
    205 020-002602-1 BIND SCREW 3M*6 SUS304 2


    Assembly Part No: 5085-409715-12 COVER(CLHP)ASSY,BACK


  • 5010-407129-11 PLATE 1
  • 5010-406167-11 PLATE 1
  • 5010-407128-11 PLATE 1
  • 5010-406168-11 PLATE 1
  • 5010-309048-11 BASE,PANEL 1
  • 5010-307114-11 PANEL 1
  • 5010-306690-11 PLATE,NUT 1
  • 5010-306691-11 PLATE,NUT 1
  • 5010-407134-11 PACKING 1
  • 5010-406169-11 PACKING 1
  • 5010-307111-11 PACKING 1
  • 5010-405584-11 LEVER 2
  • 5010-405653-11 BASE,HOLDER(R) 1
  • 5010-405654-11 HOLDER 1
  • 5010-405655-11 PLATE 2
  • 5010-405656-11 PACKING 2
  • 5010-308897-11 PANEL 1
  • 026-007246-1 SPACER WSSS5-3-1 10
  • 026-007272-1 SPACER FWSSS-D5-V3-T1.5 5
  • 020-006233-1 FACE SCREW M3*8 ROUNDED KNOB BLACK THUMB SCREW (P02872)
  • 026-002709-1 HANDLE A-67 1
  • 020-000009-1 CAP SCREW M3*10 SUS304 4
  • 020-000005-1 CAP SCREW M3*6 SUS304 7
  • 020-000518-1 CAP SCREW M3*4 SUS304 4
  • 020-001532-1 BAIND SCREW M3*8 SUS304 13
  • 020-000414-1 CAP SCREW M2*4 SUS304 4
  • 020-001089-1 CAP SCREW M3*14 SUS304 2
  • 033-000003-1 NUT M3 SUS304 2
  • 020-000032-1 CAP SCREW M4*10 SUS304 2





    This TEL Tokyo Electron 200mm CPHP General Chamber is used working surplus. The physical condition is good, but there are signs of previous use and handling.





  • Sale Details





    • Item Condition: Used Working, 90 Day Warranty


    • Estimated Packed Shipping Dimensions: L x W x H = L x W x H = 55"x26"x20" @ 265 lbs.; Requires Freight Shipping 
    • Shipping Terms: All Domestic and International shipping quotes and/or fees are subject to change due to packaging requirements, custom packing, transport rate fluctuations, and supply chain demands. We will contact you regarding any shipments that require or incur additional after purchase packing fees or rate changes.
    • Only items pictured are included: If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
    • For items with multiple quantities: The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
    • Items are sold with a 90-Day Satisfaction Guarantee





      Lister 31










    Listed with ExportYourStore.com

    GENERAL SHIPPING TERMS
    All items will be securely packaged and shipped via traceable and insured UPS, FedEx, DHL, USPS or select Freight Carriers. All tracking information is forwarded to the email address provided when you placed your order.  We require a recipient or company name, address and phone number for all shipments. Shipping and handling times may vary based on the packing requirements, so please allow up to 5 business days for handling.


    Same Day Shipping Policy         

     

    • For same day/tool down shipping you must contact us via phone at 505-345-8732 before 11:00am Mountain Standard Time and we will do our best to meet your shipping request.
    • Additional Fee for Same Day Shipping: The expedite fee will be equal to 10% of the subtotal on the sales order.
    • Same day shipping may not be available for freight items or if Semiconductor Spares is experiencing a large volume of outgoing orders.
    • Same day shipping is NOT available for international sales due to export requirements.

     

    Boxed Shipment Detaills             

    • A contact name, current phone number, and company name are required for all shipments.
    • International Shipments: Carrier rates are calculated by package dimensions and shipping location. Buyer is responsible for duties, taxes (VAT), or other import fees.
    • We cannot ship items to Post Office Boxes (PO Box).
    • You are welcome to charge shipments to your account; please provide us with your preferred carriers shipping account number and shipping method.

    Freight Shipment Details                                  

    • Freight shipments are commercial Dock to Dock deliveries; residential addresses are curbside service only, buyer is responsible for moving the product from the truck lift gate to their home.
    • Additional Fee for Residential/Home Delivery: $120.00 ($75.00 for lift gate service and $45.00 for non commercial addresses)
    • Additional Fee for Custom Crate/Pallet/Barrier Bagging: Packing rates may be added to both domestic and international shipments, please contact for current rates.
      You are welcome to arrange your own collect freight transportation please contact us via email: cs@semicondcuctorspares.com or 1-505-345-8732
    • For freight items offering free US Domestic shipping (residential delivery excluded), UES reserves the right to ship using economical method including ocean shipping service for international purchases.

    International Shipping

    International Freight items will be charged for their products at the time the order is placed. UES will then get the best quote for international freight and send the quote to the customer in a timely manner. 

    These products are subject to export restrictions under U.S. law. The Bureaus of U.S. Census and the Bureau of Industry and Security (BIS) regulate exports through the Export Administration Regulations (EAR). We DO NOT any sell items to any locations in Country Group E. Please be aware that we may require up to 30 Days to determine the products export classifications [Export Control Classification Number (ECCN)] and in the unlikely event that an export license is required, we would need an additional 30-90 Days for licensing.

    In order to comply with export control laws established by the US Department of Commerce and the US Department of State, we require a written statement defining the ultimate End User, the End Use of each product to be exported and the buyers agreement to comply with the Export Administration Regulations (EAR). You will be contacted via email with the appropriate documents that will need to be returned to us in order to complete your order, please be advised that we cannot complete your order if you do not provide all of the data requirements.

     

    International Orders are subject to DUTIES, TAXES or other Import Fees; the bidder/buyer[s] is solely responsible for these fees, documents and transportation if held at a customs office in the destination country. In the event that you have questions about international shipping logistics please contact us before purchase.

     Payments

    • We accept: PayPal, All Major Credit Cards, and Bank Wire Transfers in USD (There is a $25 wire transfer fee). 
    • The current local Sales Tax will be added to all purchases based in NEW MEXICO.